Optical Spec

FT-IR and Raman

UV-Vis-NIR Spectroscopy

Spectroscopic Ellipsometry

  • Woollam, John A.; Hilfiker, James N.; Bungay, Corey L.; Synowicki, Ron A.; Tiwald, Thomas E.; Thompson, Daniel W. Spectroscopic ellipsometry from the vacuum ultraviolet to the far infrared. AIP Conference Proceedings (2001), 550 (Characterization and Metrology for ULSI Technology), 511-518.
  • Jenkins, T. E. Multiple-angle-of-incidence ellipsometry. Journal of Physics D: Applied Physics (1999), 32(9), R45-R56.
  • Vedam, K. Spectroscopic ellipsometry: a historical overview. Thin Solid Films (1998), 313-314 1-9.
  • Woollam, John A.; Snyder, Paul G. Fundamentals and applications of variable angle spectroscopic ellipsometry. Materials Science & Engineering, B: Solid-State Materials for Advanced Technology (1990), B5(2), 279-83.
  • Collins, Robert W.; Kim, Yeon Taik. Ellipsometry for thin-film and surface analysis. Analytical Chemistry (1990), 62(17), 887A-890A, 893A-900A.